Evaluation of the membrane performance of ultra-smooth silicon organic coatings depending on the process energy density

Kleines, Lara (Corresponding author); Wilski, Stefan Sebastian; Alizadeh, Philipp Korush; Rubner, Jens; Wessling, Matthias; Hopmann, Christian; Dahlmann, Rainer

Amsterdam [u.a.] : Elsevier (2022)
Fachzeitschriftenartikel

In: Thin solid films
Band: 748
Seite(n)/Artikel-Nr.: 139169