Are Circular Shaped Masks Adequate in Adaptive Mask Overlay Topology Synthesis Method?
Saxena, Anupam
New York, NY : ASME (2011)
Journal Article
In: Journal of mechanical design
Volume: 133
Issue: 1
Page(s)/Article-Nr.: 011001
Identifier
- DOI: 10.1115/1.4002973
- RWTH PUBLICATIONS: RWTH-CONV-042461